HP Manual Probers
High-Power On-Wafer Probe Stations
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Application
MPI High-Power Device Characterization Systems are specifically designed for on-wafer high-power device testing. The TS150-HP, TS200-HP and TS300-HP MPI probe systems provide a complete 150 mm, 200 mm and 300 mm solution. They are designed to perform low contact resistance measurements of power semiconductors over a wide temperature range.
Designed specifically for high voltage and high current applications
- Measure high power devices on the wafer up to 10 kV/600 A
- Gold-plated chuck surface for minimal contact resistance and optimized vacuum holes for handling thin wafers down to 50 μm.
- Optional Taiko chuck
- Dedicated high voltage and high current test probes
- Anti-tear-off solutions
MPI ShielDEnvironment™ for precise measurements
- Design for advanced EMI / RFI / light-tight shielding
- Platen ArcShield™
- Low leakage fA capabilities
- Ready for a temperature range from -60°C to 300°C
Ergonomic design and safety
- Unique air-cushion platen controlled by a puck for fast one-handed operation
- Certified integrated safety light curtain built into a vibration isolation table to protect users
- Available with various chuck options and a wide range of accessories such as micropositioners, microscopes, etc.
Specifications
Safety and precision
Standard manual high-power probe systems are configured with a DarkBox offering a safety interlock and EMI shielding capability to ensure low-noise, accurate and safe measurements.
HP systems with ShielEnvironment integrate a safety light curtain for safe measurements.
Instrument integration
The TS150/200/300-HP can be configured with a wide variety of instrument connections, consisting of high voltage / high current tips and the wiring accessories required for optimum connection to test instruments such as the Keysight B1505 (3 kV or 10 kV) or the Keithley 2600-PCT-XB, including integration of the 8020 high power interface panel.
Air-cushion platen
MPI’s unique air-cushion platen design, with simple one-handed control, offers unmatched ease of use for fast XY navigation and fast wafer loading without compromising precise, fine positioning capability with the additional XY-Theta micrometer movement:
- YX: 25 x 25 mm
- Resolution < 1 µm
- Theta: ± 5°
- Resolution: 7.5.10-3 grad
Unique platen with Probe Hover Control™
The repeatable (1 μm) platen lift design features three discrete positions for contact, separation (300 μm) and loading (3 mm). The lift integrates a safety interlock that prevents accidental lowering of the platform. These features provide unmatched functionality and are standard offerings for the TS200/300-SE manual probe system. This system prevents damage to test probes or wafers and provides intuitive control, precise contact positioning, safe and repeatable settings.
Unique chuck Z position adjustment
In addition to the air-cushion XY platen, the TS200/300-HP integrate a 5 mm chuck Z adjustment with µm resolution for fine, precise control of contact / overtravel or correction of probe card planarity.
An indicator with a 1 mm scale provides easy feedback to the operator. The 20 mm pneumatic lift additionally offers an easy and convenient loading/unloading procedure.
Options
Various Chuck Options
10 kV coaxial or 3 kV triaxial chucks for ambient and temperature measurements
Chuck options include MPI’s 10 kV coaxial or 3 kV triaxial ambient chucks or various ERS thermal chucks to support temperature measurements from -60°C to 300°C. The touch screen control is designed to be mounted on the station for quick and convenient operation.
A top chuck plate, with electrical connection for polarization, is designed to hold Fluorinert™ fluid for a cost-effective anti-arcing solution.
High Voltage / High Current / Ultra High Power Test Probes
MPI’s high power test solutions include dedicated high voltage (HVP), high current (HCP) and ultra high power (UHP) probes. MPI’s high voltage probes are capable of measuring low leakage currents during high voltage testing up to 3 kV triaxial or 5 & 10 kV coaxial.
HCP tips use MPI's proprietary multi-contact tips to reduce contact resistance when measuring ultra-high currents up to 600 A (pulsed).
UHP tips combine both capabilities and eliminate the need to change tips for high voltage and high current applications.
Various choices of optics and movements
A wide range of optics are available with a choice of stereo for all common applications or single tube high magnification microscopes. High-resolution cameras for optimum comfort are also offered.
Advanced anti-vibration base or table
Shelves for measuring instruments
Safety to transform the test station into a TS200/300-HP (high power)
Probe card holder
Digital micrometers
Compressor and vacuum pump
