distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
MPI High-Power Device Characterization Systems are specifically designed for on-wafer high-power device testing. The TS150-HP, TS200-HP and TS300-HP MPI probe systems provide a complete 150 mm, 200 mm and 300 mm solution. They are designed to perform low contact resistance measurements of power semiconductors over a wide temperature range.
Designed specifically for high voltage and high current applications
MPI ShielDEnvironment™ for accurate measurements
Ergonomic and safety design
Safety and Accuracy
Standard manual high-power probe systems are configured with a DarkBox providing safety interlock and EMI shielding capability to ensure low-noise, accurate and safe measurements.
HP systems with ShielEnvironment integrate a light curtain for safe measurements.
Instrument Integration
The TS150/200/300-HP can be configured with a wide variety of instrument connections, which consist of high voltage/high current probes and necessary cabling accessories for optimal connection to test instruments such as the Keysight B1505 (3 kV or 10 kV) or the Keithley 2600-PCT-XB, including integration of the 8020 High Power Interface Panel.
Air-Cushion Stage
The unique design of the MPI air-cushion stage, with simple one-handed operation, provides unmatched operating comfort for fast XY navigation and rapid wafer loading without compromising precise positioning capability and fine with additional XY-Theta micrometer movement:
Single Stage with Probe Hover Control™
The repeatable (1 μm) stage lift design features three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift incorporates a safety interlock that prevents accidental platform descent. These features provide unmatched functionality and are standard offerings for the TS200/300-SE handheld probe system. This system prevents damage to test tips or wafers and provides intuitive control, precise contact positioning, safe and repeatable settings.
Unique Chuck Z-Position Adjustment
The TS200/300-HP integrates, in addition to the air-cushioned XY stage, a 5 mm chuck Z-position adjustment with µm resolution for fine and precise contact/overtravel control or probe board placement correction.
A 1 mm scale indicator provides easy feedback to the operator. The 20 mm pneumatic lift also provides an easy and convenient loading/unloading procedure.
Various Chuck Options
10 kV coaxial or 3 kV triaxial chucks for ambient and temperature measurements
Chuck options include MPI’s 10 kV coaxial or 3 kV triaxial ambient chucks or various ERS thermal chucks to support temperature measurements from -60°C to 300°C. The touch screen control is designed to be mounted on the station for quick and convenient operation.
A top chuck plate, with electrical connection for polarization, is designed to hold Fluorinert™ fluid for a cost-effective anti-arcing solution.
High Voltage / High Current / Ultra High Power Test Probes
MPI’s high power test solutions include dedicated high voltage (HVP), high current (HCP) and ultra high power (UHP) probes. MPI’s high voltage probes are capable of measuring low leakage currents during high voltage testing up to 3kV triaxial or 5 & 10 kV coaxial.
HCP tips use MPI's proprietary multi-contact tips to reduce contact resistance when measuring ultra-high currents up to 600A (pulsed).
UHP tips combine both capabilities and eliminate the need to change tips for high voltage and high current applications.
Various choices of optics and movements
A wide range of optics are available with a choice of stereo for all common applications or single tube high magnification microscopes. High-resolution cameras for optimum comfort are also offered.
Advanced anti-vibration base or table
Shelves for measuring instruments
Safety to transform the test station into a TS200/300-HP (high power)
Probe card holder
Digital micrometers
Compressor and vacuum pump
