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Sample holder for scanning microscope

Thermal and probing

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Thermal sample holder 20-200°C :

  • Maximum temperature: 200°C
  • Nominal operating temperature: 20 to 150 °C
  • Maximum heating/cooling rate: 30 °C/min
  • Accuracy: 0.1 °C
  • Lower side: magnetic metal
  • Upper side equipped with a gold-plated copper sample holder, Ø 18 mm, surrounded by M2 taps for fixing templates

Probing sample holder :

Combine precise temperature control with probing for in situ electrical and topographic measurements.

  • Dimensions: 90(L) × 35(W) × 20(H) mm
  • Plate dimensions: 16 × 16 mm
  • Temperature range: -30 ~ 150 °C (*)
  • Max. ramp rate: 30 °C/ min
  • Temperature accuracy: ±0.1 °C

(*) The lower limit of the temperature range is typically reached when the refrigerant is approximately 0 °C.


Connectez-vous à notre expert
Marie-Helene Bedelem
mh.beddelem@microtest-semi.com

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