Clusters

Robotechnik's MAXIMUS series includes high-performance microcluster systems designed for automated substrate production processes in the semiconductor industry. These systems are ideal for achieving excellent process results, uniformity, and repeatability. The MAXIMUS series includes models such as the MAXIMUS 804 and MAXIMUS 806, each tailored to specific needs and applications.

The MAXIMUS 804 is a fully automated microcluster system designed for single substrate production processes. It handles wafer sizes from Ø 2” to Ø 8” and substrate sizes from 2”x2” to 6”x6”. The system can be equipped with up to 4 process units such as coater, developer, cleaner, etcher, heating plates, cooling plates and HMDS plates. The MAXIMUS 806 offers similar capabilities but can be equipped with up to 6 process units, making it suitable for larger applications.

Technical Advantages :

• Uniformity and Repeatability: Patented Covered Chuck technology ensures excellent coating uniformity.
• Versatility: Capable of handling various processes including coating, developing, cleaning, etching and baking.
• Ease of Use: Features such as touchscreens, programmable speed and acceleration, and easy chuck changes improve user experience and maintenance.
• Automation: These fully automated and flexible systems improve the efficiency and repeatability of lithography processes.

Applications :

These microcluster systems are widely used in the semiconductor industry for processes such as photoresist coating, development, cleaning, etching, and baking. They are essential tools for achieving high-quality, uniform processing on various substrates, ensuring optimal performance in subsequent manufacturing steps.