SE Manual Probers
Probe Stations with Shielded Environment
Browse the products in the range
Application
The TS200-SE/TS300-SE (ShielDEnvironment™) MPIs are designed to provide advanced EMI/RFI/light-tightness shielding, ultra-low noise, low-leakage measurement capabilities in a temperature range of -60 to +300°C.
Universal use
Designed for a wide variety of applications such as device characterization and modeling, reliability testing, RF and mmW testing and failure analysis
Option: high-power measurement
MPI ShielDEnvironment™ for precise measurements
- Design for advanced EMI / RFI / light shielding
- Low-leakage FemtoAmp capacities
- Integrated active anti-vibration table
- Wide temperature range from -60 °C to 300 °C
Ergonomic design and options
- Unique air-cushion control of chuck movement for fast, one-handed operation
- Available with various chuck options and a wide range of accessories such as DC / RF / mmW micropositioners, microscopes and the ShielDEnviroment™ provide excellent support for a variety of applications
Light curtain option
- Option to convert the test station to TS200/300-HP for high power measurements.
Specifications
ShielDEnvironment™
MPI ShielDEnvironment™ is a high-performance local environmental chamber providing an excellent shielded test environment, tight against electromagnetic interference and light, for very low noise and low capacitance measurements.
ShielDCap™
A fully configurable part of the MPI ShielDEnvironment™ that allows up to 4 RF ports or up to 8 DC/Kelvin ports or a combination of these configurations.
Easy to reconfigure with convenient shielding that is MPI ShielDCap™ - many small things that make the difference by simplifying daily operations.
The complete ShielDCap™ is easily replaceable with the EMI shielded version of a probe card holder.
Air-Bearing Stage
MPI's unique air-bearing stage design, with simple one-hand control, offers unmatched ease of use for fast XY navigation and rapid wafer loading without compromising precise and fine positioning capability with the additional XY-Theta micrometer movement:
- YX: 25 x 25 mm
- Resolution < 1 µm
- Theta: ± 5°
- Resolution: 7.5×10⁻³ gradient
Unique Stage with Probe Hover Control™
The repeatable (1 μm) stage elevator design features three discrete positions for contact, separation (300 μm), and loading (3 mm). The elevator incorporates a safety lock that prevents accidental platform descent. These features offer unmatched functionality and are standard offerings for the TS200/300-SE manual probe system. This system prevents damage to test probes or wafers and offers intuitive control, precise contact positioning, safe and repeatable adjustments.
Unique Chuck Z-Position Adjustment
The TS200/300-SE integrates, in addition to the XY air-bearing stage, a 5 mm chuck Z adjustment with µm resolution for fine and precise control of contact/overtravel or probe card placement correction.
An indicator with a 1 mm scale provides easy feedback to the operator. The 20 mm pneumatic elevator further offers an easy and convenient loading/unloading procedure.
Options
Various Chuck Options
The TS200/300-SE is available with various chuck options to meet different budgets and application requirements:
Ambient chucks: Coaxial, Triaxial or RF with two ceramic auxiliary chucks for precise RF calibration.
Various ERS AirCool thermal chucks from -60°C to 300°C.
Temperature Control Integration
The wafer loading door is simply locked at any temperature below 15°C - this unique feature makes the TS200/300-SE the safest manual test station on the market.
In addition, the thermal chuck can be controlled using the fully integrated touchscreen, conveniently placed in front of the operator for fast operation and immediate feedback.
Integrated ERS Patented AC3 Cooling Technology
These chucks incorporate ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from "already used" air - reducing dry air consumption by up to 30-50% compared to other systems on the market.
Various Choices of Optics and Movements
A wide range of optics are available with a choice of stereo for all common DC/CV applications or single tube high magnification microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.
Advanced Anti-Vibration Base or Table
Shelves for Measuring Instruments
Safety to Transform the Test Station into a TS200/300-HP (High Power)
Probe Card Holder
Digital Micrometers
Compressor and Vacuum Pump
