distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

SE manual probers

Under-probe test stations with shielded environment

The TS200-SE/TS300-SE (ShielDEnvironment™) MPIs are designed to provide advanced EMI/RFI/light-tightness shielding, ultra-low noise, low-leakage measurement capabilities in a temperature range of -60 to +300°C.

Universal Use

Designed for a wide variety of applications such as device characterization and modeling, reliability testing, RF and mmW, and failure analysis

Option: High Power Measurement

MPI ShielDEnvironment™ for Accurate Measurements

  • Designed for advanced EMI/RFI/light shielding
  • Low leakage FemtoAmp capabilities
  • Integrated active anti-vibration table
  • Wide temperature range from -60°C to 300°C

 

Ergonomic design and options

  • Unique air-cushion chuck motion control for fast, one-handed operation
  • Available with various chuck options and a wide range of accessories such as DC/RF/mmW micropositioners, microscopes and the ShielDEnviroment™ provide excellent support for various applications

 

Light Curtain Option

  • Option to convert the test station to a TS200/300-HP for high power measurements.

ShielDEnvironment™
MPI ShielDEnvironment™ is a high performance local environmental chamber providing an excellent EMI and light shielded test environment for very low noise and low capacitance measurements.

ShielDCap™
A fully configurable part of the MPI ShielDEnvironment™ that allows up to 4 RF ports or up to 8 DC/Kelvin ports or a combination of these configurations.
Easy to reconfigure with a convenient shield that is MPI ShielDCap™ - lots of little things that make a difference in simplifying daily operations.
The complete ShielDCap™ is easily replaceable with the EMI shielded version of a PCB mount tips.

Air-cushion stage
The unique design of the MPI air-cushion stage, with simple one-handed operation, provides unmatched operating comfort for fast XY navigation and fast wafer loading without compromising the precise and fine positioning capability with the additional XY-Theta micrometer movement:

  • YX: 25 x 25 mm
  • Resolution < 1 µm
  • Theta: ± 5°
  • Resolution: 7.5.10-3 gradient

 

Single Stage with Probe Hover Control™
The repeatable (1 μm) stage lift design features three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift incorporates a safety interlock that prevents accidental platform descent. These features provide unmatched functionality and are standard offerings for the TS200/300-SE handheld probe system. This system prevents damage to test tips or wafers and provides intuitive control, precise contact positioning, safe and repeatable settings.

Unique Chuck Z Position Adjustment
The TS200/300-SE integrates, in addition to the air-cushioned XY stage, a 5 mm chuck Z adjustment with µm resolution for fine and precise contact/overtravel control or probe board placement correction.
A 1 mm scale indicator provides easy feedback to the operator. The 20 mm pneumatic lift also provides an easy and convenient loading/unloading procedure.

Various Chuck Options

The TS200/300-SE is available with various chuck options to meet different budgets and application requirements:
Ambient chucks: Coaxial, Triaxial or RF with two ceramic auxiliary chucks for precise RF calibration.
Various ERS AirCool thermal chucks from -60°C to 300°C.

Temperature Control Integration

The wafer loading door is simply locked at any temperature below 15°C - this unique feature makes the TS200/300-SE the safest manual test station on the market.
In addition, the thermal chuck can be controlled using the fully integrated touchscreen, conveniently placed in front of the operator for fast operation and feedback immediate.

Integrated ERS patented AC3 cooling technology

These chucks incorporate ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from "already used" air - reducing dry air consumption by up to 30-50% compared to other systems on the market.

Various choices of optics and movements

A wide range of optics are available with a choice of stereo for all common DC/CV applications or single tube high magnification microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.

Advanced anti-vibration base or table

Shelves for measuring instruments

Safety to transform the test station into a TS200/300-HP (high power)

Probe card holder

Digital micrometers

Compressor and vacuum pump


Connectez-vous à notre expert
Laurent BEDDELEM
laurent.beddelem@microtest-semi.com
06.34.10.75.23

Merci d'entrer vos coordonnées pour télécharger la fiche technique.