TS50 Manual Prober
Versatile test station for chips and wafers up to 50 mm – 4-tip test
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Application
The MPI TS50 manual test station has been specially designed for IC engineering, single-chip probe testing and academic use in DC/CV and RF measurement applications.
The TS50, with the smallest footprint (300 x 300 mm) on the market, is designed in its simplest form to allow convenient use and quick setup without compromising functionality and measurement capability.
Flexible platform
- Designed for research, development and academic use for IC engineering, single-chip test
Ideal platform for 4-probe resistivity testing, load pull measurements, and high-frequency noise measurement.
Ergonomic design
- Solid and stable platform with small footprint (300 x 300 mm)
- Rigid stage that can accommodate up to 6 DC positioners or 2 positioners
- Simple operation for positioning the stage and microscope
Scalability
- Available with different chuck options and a range of accessories such as DC/RF/mmW MicroPositioners, optics, microscopes and EMI shielded black box to meet various application requirements
Specifications
Easy stage
The TS50 can be configured with two different versions of chuck motion control. The Easy Stage version is a very simple, vacuum-controlled, one-hand-operated unit that enables very fast and intuitive XY-Theta movement. This is the typical configuration for simple DC/CV applications.
XY Linear Stage 50×50 mm
The 50×50 mm XY linear stage enables fast, independent axis movement with fine, precise 25×25 mm XY-Theta micrometer positioning.
It is the ideal option for RF applications or in combination with a thermal chuck.
20 mm Height Adjustment
The test stage features a fine 20 mm height adjustment required to support various applications and can be used for contact/separation control of all MicroPositioners together.
Multiple MicroPositioner Configurations
It can be configured with up to 8 MP25 MicroPositioners or 6 MP40 to meet multiple pad and test die layout requirements.
Rectangular MicroPositioner Adjustment
In addition, rectangular adjustment of the two-port RF micropositioners is a standard feature to ensure RF probe alignment.
Options
Triaxial RF Chuck
For RF applications, the TS50’s 50 mm triaxial chuck is equipped with a ceramic auxiliary chuck for precise RF calibration.
Wide Selection of Optics and Movements
A wide range of optics is available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations.
Integrated Circuit Carrier
An optional single die carrier transforms the TS50 into an ideal platform for testing single DUTs down to 1×1 mm. It includes a convenient, stable vacuum switch to securely secure die sizes as large as 10×10 mm. The incorporation of an integrated calibration stand at a parallel height allows for RF measurements and can be mounted on any chuck, including a variety of thermal chucks.
Advanced anti-vibration base or table
Shelves for measuring instruments
Dark box
Compressor and vacuum pump
