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Prober TS50 manual

Versatile test station for chips and wafers up to 50 mm – 4-tip test

The MPI TS50 manual test station has been specially designed for IC engineering, single-chip probe testing and academic use in DC/CV and RF measurement applications.

The TS50, with the smallest footprint (300 x 300 mm) on the market, is designed in its simplest form to allow convenient use and quick setup without compromising functionality and measurement capability.

 

Flexible platform

  • Designed for research, development and academic use for IC engineering, single-chip test
    Ideal platform for 4-probe resistivity testing, load pull measurements, and high-frequency noise measurement. frequency

 

Ergonomic design

  • Solid and stable platform with small footprint (300 x 300 mm)
  • Rigid stage that can accommodate up to 6 DC positioners or 2 positioners
  • Simple operation for positioning the stage and microscope

 

Expandability

  • Available with different chuck options and a range of accessories such as DC/RF/mmW MicroPositioners, optics, microscopes and EMI shielded black box to meet various application requirements

Easy stage
The TS50 can be configured with two different versions of chuck motion control. The Easy Stage version is a very simple, vacuum-controlled, single-handed unit that allows very fast and intuitive XY-Theta movement. This is the typical configuration for simple DC/CV applications.

50×50 mm XY linear stage
The 50×50 mm XY linear stage allows fast and independent movement of the axes with fine and precise XY-Theta micrometric positioning of 25×25 mm.
It is the ideal option for RF applications or in combination with a thermal chuck.

20 mm height adjustment
The breadboard has a fine height adjustment of 20 mm required to support various applications and can be used for contact/separation control of all MicroPositioners together.

Multiple configurations of MicroPositioners
It can be configured with up to 8 MP25 or 6 MP40 MicroPositioners to meet multiple pad and test chip layout requirements.

Rectangular adjustment of MicroPositioners
In addition, rectangular adjustment of dual-port RF MicroPositioners is a standard feature to ensure alignment of RF probes.

Triaxial RF Chuck
For RF applications, the TS50’s 50 mm triaxial chuck is equipped with a ceramic auxiliary chuck for precise RF calibration.

Wide Selection of Optics and Movements
A wide range of optics is available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations.

Integrated Circuit Carrier
An optional single die carrier transforms the TS50 into an ideal platform for testing single DUTs down to 1x1 mm. It includes a convenient, stable vacuum switch to securely secure die sizes as large as 10x10 mm. The incorporation of an integrated calibration stand at a parallel height allows for RF measurements and can be mounted on any chuck, including a variety of thermal chucks.

Advanced anti-vibration base or table

Shelves for measuring instruments

Dark box

Compressor and vacuum pump


Connectez-vous à notre expert
Laurent BEDDELEM
laurent.beddelem@microtest-semi.com
06.34.10.75.23

Merci d'entrer vos coordonnées pour télécharger la fiche technique.