Micro test chamber
manual tips
(option 80K to +1000°C)
Manual tips (option 80K to +1000°C)
Browse the products in the range
Presentation
Overview :
The microprobe is a hyper-compact precision measurement tool to analyze the electrical, optical and physical properties of samples at a microscopic scale (dielectric, ionic, semiconductor, electronic) and their interfaces (e.g. grain boundaries and electrodes).
These measurements can be performed under the desired environmental conditions of temperature, humidity, gas, vacuum, etc. in order to reproduce real in-situ conditions.
Configuration: see the detailed configurations on the following tab: number of tips, temperature control.
Despite the expansion / contraction of the substrate depending on the temperature, the contact point with the tip does not change thanks to the micropositioner.
Versatile use and very wide fields of applications:
- Characterization and testing of materials such as advanced ceramic materials, electronic and display materials, materials for high-temperature dielectric and insulating sensors, materials for fuel cells and solid electrolytes.
- The characterization of photovoltaic and thermoelectric materials.
- The thermal conductivity of raw materials and/or materials deposited in thin layers.
- The characterization of MEMS/NEMS and Micro/Nano sensors.
- Potentially any application related tothe measurement of electrical, opticaland physical properties.
Configurations
Number of tips:
- In standard configuration: 4, 6 or 8 tips.
- In custom-made: see the example photos with 10 and 13 tips. Contact us for any specific request.
Control of environmental conditions:
- Precise humidity control system.
- Mass flow controller (MFC) for gases, up to 4 gas lines.
- Precise pressure and vacuum level control system.
7 configurations for sample temperature control:
1 - No temperature control device.
The sample is simply physically held on the substrate holder and can be grounded.
2 - Peltier device:
a. -40 to +200°C range, sample size: 19 x 19 mm
b. -40 to +170°C range: Peltier device with hole diam. 3.2 mm, for transmittance measurements e.g. Sample size: 16 x 16 mm
3 - Ceramic heater, sample size: Ø 1/2 inch (12.7 mm)
Thermocouple value inside the heater unit:
- Ambient to +450 °C
- Ambient to +750 °C
- Ambient to +1000 °C
4 - Liquid nitrogen cooling device
Temperature: 80 K (-193.15 °C) to ambient
Ramp of temperature up and down: 20°C/min
Options and custom-made
Options : The microchamber for testing under tips with manual positioning is available with the following options:
- Cover: solid, or with ZnSe porthole for infrared transmittance, or with 1’’ diameter porthole or even a cover entirely made of quartz.
- External xyz micropositioner: precise positioning arm that allows precise and fine adjustment with an external micropositioner when the size of the contact pad is small (up to 200µm).
- For contact pads smaller than 200 µm, it is recommended to use a piezoelectric micropositioner (Cf. Micro test chamber with motorized tips)
- Thermocouple for measuring the surface temperature of the substrate.
Custom-made:For your most demanding and specific needs, contact us to design your custom-made microchamber, by defining:
- Dimensions
- Number of probes
- Type of probes
- Optical components
- Temperature range
- RF measurements
- Control of humidity
- Process gas control
- High current
- Etc.
