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Micro test chamber
manual tips
(option 80K to +1000°C)

Manual tips (option 80K to +1000°C)

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Overview : ​

The microprobe is a hyper-compact precision measurement tool to analyze the electrical, optical and physical properties of samples at a microscopic scale (dielectric, ionic, semiconductor, electronic) and their interfaces (e.g. grain boundaries and electrodes).​ ​

These measurements can be performed under the desired environmental conditions of temperature, humidity, gas, vacuum, etc. in order to reproduce real in-situ conditions.

Configuration: see the detailed configurations on the following tab: number of tips, temperature control. ​ ​

Despite the expansion / contraction of the substrate depending on the temperature, the contact point with the tip does not change thanks to the micropositioner. ​ ​

Versatile use and very wide fields of applications:

  • Characterization and testing of materials such as advanced ceramic materials, electronic and display materials, materials for high-temperature dielectric and insulating sensors, materials for fuel cells and solid electrolytes. ​
  • The characterization of photovoltaic and thermoelectric materials.
  • The thermal conductivity of raw materials and/or materials deposited in thin layers.
  • The characterization of MEMS/NEMS and Micro/Nano sensors.
  • Potentially any application related tothe measurement of electrical, opticaland physical properties.

Number of tips: ​

  • In standard configuration: 4, 6 or 8 tips.
  • In custom-made: see the example photos with 10 and 13 tips. Contact us for any specific request. ​

Control of environmental conditions: ​

  • Precise humidity control system.
  • Mass flow controller (MFC) for gases, up to 4 gas lines.
  • Precise pressure and vacuum level control system.

7 configurations for sample temperature control: ​

​1 - No temperature control device.

The sample is simply physically held on the substrate holder and can be grounded. ​

2 - Peltier device:

            a. -40 to +200°C range, sample size: 19 x 19 mm ​

            b. -40 to +170°C range: Peltier device with hole diam. 3.2 mm, for transmittance measurements e.g. Sample size: 16 x 16 mm​

3 - Ceramic heater, sample size: Ø 1/2 inch (12.7 mm)​

Thermocouple value inside the heater unit: ​

  • Ambient to +450 °C
  • Ambient to +750 °C​
  • Ambient to +1000 °C

4 - Liquid nitrogen cooling device​

Temperature: 80 K (-193.15 °C) to ambient ​

Ramp of temperature up and down: 20°C/min​

Options : The microchamber for testing under tips with manual positioning is available with the following options: ​

  • Cover: solid, or with ZnSe porthole for infrared transmittance, or with 1’’ diameter porthole or even a cover entirely made of quartz. ​
  • External xyz micropositioner: precise positioning arm that allows precise and fine adjustment with an external micropositioner when the size of the contact pad is small (up to 200µm). ​
  • For contact pads smaller than 200 µm, it is recommended to use a piezoelectric micropositioner (Cf. Micro test chamber with motorized tips) ​
  • Thermocouple for measuring the surface temperature of the substrate.​

Custom-made:For your most demanding and specific needs, contact us to design your custom-made microchamber, by defining: ​

  • Dimensions​
  • Number of probes​
  • Type of probes ​
  • Optical components ​
  • Temperature range​
  • RF measurements​
  • Control of humidity​
  • Process gas control ​
  • High current​
  • Etc. ​

Connectez-vous à notre expert
Marie-Helene Bedelem
mh.beddelem@microtest-semi.com

Merci d'entrer vos coordonnées pour télécharger la fiche technique.