Microtest Chamber
Manual Probes
(80K to +1000°C option)
Manual Probes (80K to +1000°C option)
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Presentation
Overview :
The microprobe is a hyper-compact precision measurement tool to analyze the electrical, optical and physical properties of samples at a microscopic scale (dielectric, ionic, semiconductor, electronic) and their interfaces (e.g. grain boundaries and electrodes).
These measurements can be performed under the desired environmental conditions of temperature, humidity, gas, vacuum, etc. in order to reproduce real in-situ conditions.
Configuration: see the detailed configurations on the following tab: number of tips, temperature control.
Despite the expansion / contraction of the substrate depending on the temperature, the contact point with the tip does not change thanks to the micropositioner.
Versatile use and very wide fields of applications:
- Characterization and testing of materials such as advanced ceramic materials, electronic and display materials, materials for high-temperature dielectric and insulating sensors, materials for fuel cells and solid electrolytes.
- Characterization of photovoltaic and thermoelectric materials.
- Thermal conductivity of raw materials and/or thin film deposits.
- Characterization of MEMS/NEMS and Micro/Nano sensors.
- Potentially any application related to the measurement of electrical, optical and physical properties.
Configurations
Number of probes:
- Standard configuration: 4, 6 or 8 probes.
In custom-made: see example photos with 10 and 13 probes. Contact us for any specific request.
Environmental conditions control:
- Precise humidity control system.
- Mass Flow Controller (MFC) for gases, up to 4 gas lines.
- Precise pressure and vacuum level control system.
7 configurations for sample temperature regulation:
1 - No temperature control device.
The sample is simply physically held on the substrate holder and can be grounded.
2 - Peltier device:
a. Range -40 to +200°C, sample size: 19 x 19 mm
b. Range -40 to +170 °C: Peltier device with 3.2 mm diam. hole, for transmittance measurements e.g. Sample size: 16 x 16 mm
3 - Ceramic heating device, sample size: Ø 1/2 inch (12.7 mm)
Thermocouple value inside the heating unit:
- Ambient to +450 °C
- Ambient to +750 °C
- Ambient to +1000 °C
4 - Liquid nitrogen cooling device
Temperature: 80 K (-193.15°C) to ambient
Heating and cooling temperature ramp: 20°C/min
Options and Custom-made
Options : The microchamber for testing under tips with manual positioning is available with the following options:
- Cover: solid, or with ZnSe porthole for infrared transmittance, or with 1’’ diameter porthole or even a cover entirely made of quartz.
- External xyz micropositioner: precise positioning arm that allows precise and fine adjustment with an external micropositioner when the size of the contact pad is small (up to 200µm).
- For contact pads smaller than 200 µm, it is recommended to use a piezoelectric micropositioner (Cf. Micro test chamber with motorized tips)
- Thermocouple for measuring the surface temperature of the substrate.
Custom-made: For your most demanding and specific needs, contact us to design your custom-made microchamber, by defining:
- Dimensions
- Number of probes
- Type of probes
- Optical components
- Temperature range
- RF measurements
- Control of humidity
- Process gas control
- High current
- Etc.
