distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
Presentation:
The microprobe is a hyper-compact precision measurement tool to analyze the electrical, optical and physical properties of samples at a microscopic scale (dielectric, ionic, semiconductor, electronic) and their interfaces (e.g. grain boundaries and electrodes).
These measurements can be performed under the desired environmental conditions of temperature, humidity, gas, vacuum, etc. in order to reproduce real in-situ conditions.
Up to contact pad sizes of 200 µm, manual tips, potentially assisted by the external xyz micropositioner, allow to achieve the required tip positioning accuracy.
For contact pads smaller than 200 µm, it is recommended to use the piezoelectric micropositioners of the motorized tips.
Precise positioning is possible remotely at the desired location. For very small contact pads, we offer very fine tips less than 10 µm.
Despite the expansion/contraction of the substrate depending on the temperature, the contact point with the tip does not change thanks to the micropositioner.
Versatile use and very broad fields of application:
Specifications of piezoelectric positioners:
The number of tips:
Control of environmental conditions:
7 configurations for sample temperature regulation:
1 - No temperature control device.
The sample is simply physically held on the substrate holder and can be grounded.
2 - Peltier device:
a - Range -40 to +200°C, sample size: 19 x 19 mm
b - Range -40 to +170°C: Peltier device with hole diam. 3.2 mm, for transmittance measurements e.g. Sample size: 16 x 16 mm
3 - Ceramic heater, sample size: Ø 1/2 inch (12.7 mm)
Thermocouple value inside the heater unit:
a - Ambient to +450 °C
b - Ambient to +750 °C
c - Ambient to +1000 °C
4 - Liquid nitrogen cooling device
Temperature: 80 K (-193.15 °C) at ambient
Temperature ramp up and down: 20 °C/min
Options: The microchamber for testing under tips with motorized positioning is available with the following options:
Custom-made: For your most demanding and specific needs, contact us to design your custom-made microchamber, by defining:
