distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
The TS2000-HP and TS3000/3500-HP are MPI’s dedicated probe stations for characterizing high-power devices on wafers over a wide temperature range of -60°C to +300°C and a wide measurement range of 3 kV (triax) / 10 kV (coax) and 600 A.
These systems integrate MPI’s ShielDEnvironment™ providing an ultra-low noise and shielded environment. With the WaferWallet®, the TS3500-HP is the ideal choice to meet the increased demands for productivity (up to 10 times higher) and fully automatic wafer handling, e.g. 150 mm SiC wafers, 200 mm GAN, as well as 300 mm SiGe wafers.
Testing on thin or Taiko wafers is an available option for both systems.
These systems integrate advanced MPI technologies, such as VCE™ , mDrive™ and/or PHC™ as an option or as a field upgrade.
Safety
The interlock-activated safety light curtain protects users from accidental high voltage discharge by shutting down the instrument via the interlock system.
The system features rear doors, also protected by an interlock system, to facilitate the setup of the measurement configuration.
ShielDEnvironment™
MPI ShielDEnvironment™ is a high-performance local environmental chamber that provides an excellent EMI and light-tight shielded test environment for ultra-low noise and low capacitance measurements.
High Voltage, High Current and Ultra High Power Test Tips
MPI High Power test solutions include dedicated high current test tips that utilize MPI’s multi-contact tips for reduced contact resistance. MPI's high-voltage probes are capable of measuring low leakage currents during high-voltage testing up to 3 kV triaxial or 5 kV & 10 kV coaxial, and up to 600 A.
MPI's high-power probe card prevents arcing up to 10 kV and offers unique testing capabilities up to 150°C.
Hot/Cold Wafer Changeover at a Defined Temperature
The TS2000-HP's single-wafer automatic loader and safety test management provide a unique capability to load/unload wafers at any temperature. It is no longer necessary to cool or warm to room temperature to load or unload a wafer. This saves significant downtime and significantly increases the overall efficiency of MPI test systems.
A wide range of chucks to suit the application
The TS2000/3000-SE is available with different chuck options to suit different budgets and application requirements:
Ambient chucks: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for precise RF calibration.
Various ERS AirCool thermal chucks from -60°C to 300°C.
Auxiliary chucks for RF calibration
The RF chucks integrate two auxiliary chucks constructed of ceramic for precise RF calibration.
Measurement instrument integration
The optional instrument shelf reduces cable length and increases measurement dynamics and directionality for RF and mmW applications.
Various choices of optics and movements
A wide range of optics are available for all common DC/CV applications or for high magnification digital microscopes for RF or load-pull configurations.
Optional Arc-Free LiquidTray™
The specially designed arc-free LiquidTray™ can be used by simply placing it on the surface of the high-power chuck. Wafers can be safely placed inside the tray to be immersed in the liquid for high-voltage testing without arcing.
