distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
Spin Coater
Available in table-top or bench-mounted versions, this spinner offers coater, developer and cleaner functions, thanks to 3 dispensing lines (5 optional), for substrates up to Ø200 mm (8″) or 150 x 150 mm (6″ x 6″). Simple drying (dryer) is also possible, using only the equipment’s spinner mode.
Dispensing can be done manually by the operator, or by an electronic dispensing arm, programmable from the ergonomic, easy-to-use touch screen (recipe editing and recording, etc.).
It can work in “Open Bowl” or “Close Cover Chuck” mode to avoid contamination and guarantee better deposit homogeneity.
Spin Coater
The version for substrates up to Ø300 mm (12″) or 230 x 230 mm (9″ x 9″) is available on request, only in bench-mounted or stand-alone versions.
Like the version, dispensing can be carried out manually by the operator or by an electronic dispensing arm, programmable from the ergonomic, easy-to-use touch screen (editing and recording of recipes, etc.).
It can also be operated in “Open Bowl” or “Close Cover Chuck” mode to avoid contamination and guarantee better deposit homogeneity.
Spray-Coater
In-line spray-coating (2D), for flat substrates up to Ø300 mm (12″) or 230 x 230 mm (9″ x 9″), with topographical structures.
The resin stream is mixed with a nitrogen stream for greater homogeneity.
The various parameters to be taken into account for optimum spray-coating: solvent type, resin flow rate, nozzle-substrate distance, nitrogen pressure, substrate holder temperature, nozzle travel speed.
Spray Coater 3D
3D spray-coating, using a 6-axis robot, for large flat, concave or convex substrates up to a maximum size. = 1,500 x 1,500 mm and up to 300 mm high, managed by an ergonomic, easy-to-use interface (22″ touch screen)
It incorporates a heating plate (up to 100°C max.) which can be used during the process (like a heating chuck) or alongside for baking. Up to 2 ultrasonic nozzles are also available, with a “quick-exchange” function that automatically switches from one nozzle to the other.
It can also be used for 2D in-line spray-coating.
