Clusters

Clusters

For substrates up to Ø300 mm (12″) or 230 x 230 mm (9″ x 9″), the equipment enables automatic production, perfectly adapted to your activity, thanks to its flexible configuration with various modules: spin-coater, developer, temperature tower (hot/cool plates, HMDS hotplate).

Loading and transfer from one module to the next are fully automated: loading by FOUP and robot, with the option of integrating a flipper module (wafer turning module), an alignment module, etc.