Robotechnik's Spin Coater series is designed to deliver exceptional coating uniformity and repeatability. Utilizing patented Covered Chuck technology, these systems are ideal for thin and thick resist layers, high-topography substrates, and square substrates. The OPTIcoat ST20, ST30, ST60, and ST75 models cover a wide range of wafer and substrate sizes, from 2” to 750 mm in diameter and up to 20” x 20” for square substrates. This equipment is used in a variety of microelectronic and semiconductor applications, including lithography, photoresist deposition, and other critical coating processes.
Robotechnik equipment has many advantages :
- Uniformity and Precision: Spin coaters achieve uniform thin films through centrifugal force and liquid surface tension, ensuring even coverage.
- Flexibility: They are able to process a variety of substrates of different sizes and shapes, offering great adaptability to specific user needs.
- Ease of use: The systems are equipped with intuitive user interfaces with touch screens, allowing the creation of tailor-made recipes for different types of resins and products to be dispensed.
- Durability: Designed for a long life, these devices maintain their quality of use for more than 15 years.
- Protection and Safety: Protective covers prevent splashes and contamination of resin layers, ensuring a clean and safe working environment.
User interface with touch screen.
Programmable speed and acceleration.
Easy replacement of chucks for different substrate sizes.
Easily replaceable process bowls.
Up to 1000 programmed recipes.
Interface Ethernet.
OPTIcoat ST20 :
- Rotation speed up to 8,000 rpm
- Wafer size up to Ø 200 mm or substrate up to 150 mm x 150 mm,
OPTIcoat ST30 :
- Rotation speed up to 6,000 rpm
- Wafer size up to Ø 300 mm or substrate up to 225 mm x 225 mm
OPTIcoat ST60 :
- Rotation speed up to 2,500 rpm
- Wafer size up to Ø 560 mm or substrate up to 400 mm x 400 mm
OPTIcoat ST75 :
- Rotation speed up to 2,500 rpm
- Wafer size up to Ø 750 mm or substrate up to 508 mm x 508 mm
Robotechnik's Spin Coater range of equipment offers a variety of options to meet specific user needs. :
- Programmable distribution arm in position and speed
- Photosensitive resin dispensing systems (syringe or pumps)
- Buses de distribution (spray, flux continu)
- Media lines heated up to 80°C
- Various sizes of PEEK suction chucks
- Disposable process bowls with splash rings
- Vacuum pump
- Heating plate available for certain models (OPTIcoat ST22 and ST23)
- Different versions available, can be integrated into a worktop or with a bench
- Possible cluster integration
