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Probers TS2000-3000-SE

Automated test stations with shielded environment

MPI's TS2000-SE is the first 200mm automated engineering probe test system on the market, incorporating innovative features specifically designed to reduce the cost of test. These features are incorporated into the MPI ShielDEnvironment™ for ultra-low noise, highly accurate and highly reliable DC/CV, RF and High Power measurements.

The TS3000-SE is the natural evolution of the TS3000 test system equipped with the MPI ShielDEnvironment™ for ultra-low noise, highly accurate and highly reliable DC/CV, 1/f, RTS and RF measurements, primarily addressing the needs of device characterization, wafer-level reliability and RF & mmW.

The unique design of the actively cooled test board provides maximum stability over a wide temperature range from -60° to 300°C and makes the TS2000/3000-SE systems an excellent choice for testing devices under different thermal conditions.

They incorporate MPI's advanced technologies, such as mDrive™ and/or VCE™ as an option or as a customer field upgrade.

ShielDEnvironment™
MPI ShielDEnvironment™ is a high-performance local environmental chamber providing an excellent shielded, electromagnetic interference- and light-tight test environment for ultra-low noise, low capacitance measurements.

ShielDCap™
A fully configurable part of the MPI ShielDEnvironment™ that allows up to 4 RF ports or up to 8 DC/Kelvin ports or a combination of these configurations.
Easy to reconfigure with convenient shielding that is MPI ShielDCap™ - lots of little things that make a difference in simplifying daily operations.
The complete ShielDCap™ is easily replaced with the EMI shielded version of a pronged card holder.

Integrated control panel
The intelligent control panel is fully integrated into the system and was designed based on decades of experience and customer interactions to provide faster, safer, and more convenient probe control and testing operations. The keyboard and mouse are strategically placed to control the software if necessary and also control Windows®-based instrumentation.
The vacuum control panel for the Wafer and AUX chucks is located on the front right side for easy access during the loading/unloading procedure.

Integrated ERS patented AC3 cooling technology
These chucks incorporate ERS' patented AC3 cooling technology and air management system to purge the MPI ShielDEnvironment™ directly from "used" air - reducing dry air consumption by up to 30-50% compared to other systems on the market.

A wide range of chucks to suit the application
The TS2000/3000-SE is available with different chuck options to suit different budgets and application requirements:
Ambient chucks: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for precise RF calibration.
Various ERS AirCool thermal chucks from -60°C to 300°C.

Auxiliary chucks for RF calibration
The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.

Measurement instrument integration
The optional instrument shelf reduces cable length and increases measurement dynamics and directivity for applications RF and mmW.

Different choices of optics and movements
A wide range of optics is available for all common DC/CV applications or for high-magnification digital microscopes for RF or load-pull configurations.

Advanced alignment
Advanced alignment features such as the down-facing off-axis camera and the up-facing camera mounted on the chuck make the TS2000/3000-SE an ideal platform for testing in complex RF, mmW and SiPh measurement setups. Decades of experience from the MPI Photonics Automation division make this option very reliable.


Connect with our expert
Laurent BEDDELEM
laurent.beddelem@microtest-semi.com
06.34.10.75.23

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