AT200M

BEDROOM

• RT chamber temperatures at 300°C ± 1°C
• RT precursor temperatures at 150°C ± 2°C (with heating jacket)
• Smallest footprint on the market (1.6 sq ft), tabletop installation, compatible with rooms
• white, can also be placed in a glove box.
• Simple system maintenance and low energy and precursor consumption.
• Low chamber volume
• Very fast cycling capacity.
• Full HW and SW interlocks for safe operation, even in a multi-user environment.

SOFTWARE

• Human-machine interface (HMI) PLC system with 5-inch touch screen.
• Advanced controls suitable for standard ALD cycle deposition
• Recipe database for tested, high-quality processes
• Personalized recipe entry screen
• Real-time display of process status
• Individually programmable heating source temperatures
• Integrated pulse sequences for ternary compounds and nanolaminates
• Quick operation with simple questions to get the user started
• Entering subcycles and overall cycles

OPTIONS

• No integration into a glove box (fits in a glove box). Custom chuck/tray (square, circular, double substrates, baskets, small parts, thicker substrates)
• ATOzone - Ozone generator (necessary for certain films: Pt, Ir, SiO2, MoO2, high quality Al2O3 below 60°C, high quality HfO2).
• Option - Ozone Safety Monitor with real-time detection of ambient gaseous ozone
• 4 port option (e.g.: 2 heated precursors, 1 unheated precursor, 1 counter-reagent)
• Powder coating drum
• External control - PC/software link (allows remote programming and operation)
• Ventilated precursor cabinet included
• Spare rooms

UTILITES

• N2 purge gas should be >99.9995% with a shut-off valve (regulated to 10 - 30 psi, metal sealed),
• Connect the nitrogen purge gas (UHP) via a 1/4″ sealed metal line to the 1/4″ compression fitting at the rear of the chamber.
• Attach 90-110 psi clean dry air via 1/4″ polyethylene pipe or metal conduit to the other 1/4″ compression fitting.
• Secure the pump with a suitable 1″ vacuum hose (preferably metal (SS)) (KF25), O-ring and hose clamp.
• The other side (exhaust side) of the vacuum pump (*perfluorinated vacuum oil like Fomblin, required) should go to the standard lab exhaust or roof with a draft >5cfm (1″ pipe, also).
• Beyond one meter, 1.5″ tubes (NW40) must be used.
• The precursors are fixed using female VCR elbows (always use new joints). 1/4″ joint first (with gloves)