Spin Coater cover chuck Dominus

Robotechnik's DOMINUS Coater series is a range of high-performance spray coating systems designed for various applications in the semiconductor industry and related fields. These systems are ideal for achieving excellent deposition results on specific or non-uniform structures, with a high level of uniformity and repeatability. The DOMINUS Coater series includes models such as the DOMINUS Coater ST22i and ST30i, each tailored to specific needs and applications.

The DOMINUS Coater ST22i is a spray coating system designed for wafers up to Ø 8” (Ø 200 mm) and substrates up to 6” x 6” (150 mm x 150 mm). It features a process chamber with a safety door, an OPTIhot HB 20+ hotplate with lifting pins, and a programmable media arm with a micro-nozzle. The DOMINUS Coater ST30i offers similar capabilities but supports larger wafers up to Ø 12” (Ø 300 mm) and substrates up to 9” x 9” (225 mm x 225 mm).

Technical Advantages :

• Uniformity and Repeatability: Advanced Spray Coating technology ensures excellent uniformity and repeatability on any type of structure, especially those with differences in topography.
• Versatility: Able to handle various deposition processes, for different shapes, sizes and substrate types. Flexibility in spray orientation can allow for the implementation of varied recipes to suit the required conditions.
• Ease of Use: Features such as touchscreens and programmable nozzles improve user experience and maintenance.
• Automation: The implementation of automatic recipes improves the efficiency and reproducibility of the processes implemented.

Applications :

These spray coating systems are used in the semiconductor industry as well as other parallel industries (optics, medical, etc.) for photosensitive resin coating processes and other thin film applications. Their flexibility allows the implementation of processes not available with conventional spin coating systems.