Auto UV curing (UV-9200/UV-9300)

The UV-9200 and UV-9300 models feature several advantageous technical features :

• Fully automatic operation, eliminating the need for manual contact with wafers,
• Continuous treatment cycle for optimum efficiency,
• Familiar and easy-to-use Windows software interface,
• Ozone-free UV irradiation source, ensuring a safe working environment,
• Low cost of ownership,
• Small footprint of 58 × 111 cm, ideal for limited production spaces.

The system uses an effective UV wavelength of 365 nm and can process up to 12 wafers in just 8 minutes, providing high productivity.

The UV-9200 and UV-9300 systems offer a simple and effective UV treatment process :

• The operator inserts the wafer cassette and starts the process,
• The system automatically scans the cassette to determine occupied slots,
• The wafers are transported and exposed individually according to the programmed recipe,
• The system optimizes processing time by preparing the next wafer while the current wafer is being exposed,
• Once the treatment is complete, the operator can remove the cassette.

Additionally, the UV-9300 offers additional features such as :

• Online measurement of UV intensity,
• Special operating mode for recipe formulation and testing,
• Safety interlocks for operator protection,
• User configurable signal lamps.

In summary, the UV-9300 is an efficient and safe automatic UV curing system, providing a complete solution for UV curing needs in the semiconductor industry.