French distributor of equipment and consumables for the Semiconductor industry.

4-probe test microchamber
for
X-ray diffractometry

4 tips for X-ray diffractometry

Presentation

Presentation:
The microprobe test chambers are a hyper compact precision measurement tool to analyze the electrical, optical and physical properties of samples at a microscopic scale (dielectric, ionic, semiconductor, electronic) and their interfaces (e.g. grain boundaries and electrodes).

This 4-tip microchamber is dedicated to in situ XRD measurements at high temperature and in vacuum.
The manual tips allow to apply a voltage or read a current.

These measurements can be carried out in the desired environmental conditions of temperature, gas, vacuum, etc. in order to reproduce real in-situ conditions.

Applications:
Applications in various research fields using the microchamber with an XRD chamber:

  • In situ analysis of the phase transition as a function of an oxidizing or reducing gas atmosphere (using XRD), and of the electrical properties (using the tips)
  • In situ analysis of the changes in the crystal structure as a function of periodic temperature changes of a battery cell
  • In situ analysis of the crystal structure of the anode or cathode of a battery cell after a cycle of periodic charges and discharges using the tips
  • In situ analysis of the phase transition during the CVD (Chemical Vapor Desposition) process or of changes in the thickness of layers thin.
  • In situ analysis of the phase transition when applying a field to the sample at different temperatures
  • In situ analysis of the phase transition as a function of temperature (by XRD), and electrical properties (via probes)
  • etc.

Configurations

Microchamber with 4 tips
Dome material: PEEK
Angles:
2θ = 0~160°
Ψ=0~85°
Φ=0~360°

Environmental conditions control:

  • Mass flow controller (MFC) for gases
  • Precise pressure and vacuum level control system, vacuum level: ~10-3 torr

2 configurations for sample temperature control:
1 - Peltier device, range -40 to +200°C

  • Sample size: 19 x 19 mm
  • Sample holder material: Rhodium-coated Copper

2 - Ceramic heating device, range ambient to +1000°C (thermocouple value inside the heating unit)

  • Sample size: Ø 1/2 inch (12.7 mm)
  • Tip material: Rhodium

Custom

For your most demanding and specific needs, contact us to design your custom microchamber, by defining:

  • Dimensions
  • Number of probes
  • Type of probes
  • Optical components
  • Temperature range
  • RF measurements
  • Humidity control
  • Process gas control
  • High current
  • Etc.

Connect with our expert

Marie-Helene Bedelem

mh.beddelem@microtest-semi.com

Please enter your contact information to download the technical data sheet.