distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

Standard manual probers

Versatile test stations for chips and wafers up to 300 mm

MPI TS150, TS200 and TS300: A complete range of manual probe test stations for reliable and accurate DC/IV and RF electrical measurements

Flexible and universal use

  • Designed for a wide variety of applications such as device characterization and modeling, wafer reliability testing, failure analysis, IC engineering, MEMS and high power

 

Ergonomic design

  • Unique air-cushion chuck motion control for fast, one-handed operation
  • Rigid stage to accommodate up to 10 DC positioners or 4 RF positioners
  • Highly repeatable stage lift with three positions for contact, separation and loading

 

Scalability

  • Available with various chuck options and a wide range of accessories such as DC/RF/mmW micropositioners, optics, microscopes and an EMI shielded black box to suit various applications

MPI probe test stations incorporate numerous innovations to improve the ergonomics of use, the quality and the repeatability of the measurements performed.

Air-cushion stage
The unique design of the MPI air-cushion stage, with simple one-handed control, offers unmatched comfort of use for fast XY navigation and fast wafer loading without compromising the precise and fine positioning capability with the additional XY-Theta micrometric movement:

  • YX: 25 x 25 mm
  • Resolution < 1 µm
  • Theta: ± 5°
  • Resolution: 7.5.10-3 gradient

 

Stage Z Adjustment
The entire test stage is adjustable over a 20 mm range to allow the position of all manipulators to be adjusted at the same time or to make contact from a probe card.

Unique removable stage for contact and separation
Measurement accuracy depends first and foremost on the quality of the contact! The highly repeatable stage elevation design (1µm) with three discrete positions for contact, separation (300µm) and loading (3mm) with a safety interlock utility are all examples of unmatched features incorporated into MPI manual test stations. These features help prevent unexpected damage to the probe or silicon wafer, while providing intuitive control and precise contact positioning. This capability is especially critical in high-frequency and high-power applications to achieve the most accurate measurement results.

Vibration Isolation Platform
All handheld systems are equipped with a vibration-absorbing base to ensure long-term stable and reliable contact between the probe and the pad, ensuring reliable measurement results.

A wide range of chucks to suit the application

Manual systems are available with a variety of chuck options to suit different budgets and application requirements. Options include MPI coaxial or triaxial chucks or a variety of ERS thermal chucks to support temperature measurements up to 300°C, with seamless integration of the touchscreen control for quick and convenient access and operation.

Auxiliary chucks for RF calibration

The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.

Various choices of optics and movements

A wide range of optics is available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.

Advanced anti-vibration base or table

Shelves for measuring instruments

Dark box

Probe card holder

Digital micrometers

Compressor and vacuum pump


Connectez-vous à notre expert
Laurent BEDDELEM
laurent.beddelem@microtest-semi.com
06.34.10.75.23

Merci d'entrer vos coordonnées pour télécharger la fiche technique.