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Probers Manuals AIT – THZ

Under-probe test stations for THZ measurements and tuner integration

The MPI TS150/300-AIT and TS150/200-THZ on-board test systems expand MPI's unique solutions for emerging THz applications such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and healthcare equipment, and short-range automotive radars by adding active impedance tuner integrations on the same test stations. These systems are the first 150 mm, 200 mm and 300 mm explicitly designed for industry, enabling precise testing with the combination of microwave (mmW), THz application requirements and automated impedance tuner, with the best possible measurement directivity.

The TS150-THZ(ANT) for antenna measurements is also available.

Variety of applications

  • Seamless integration of all differential or broadband frequency extenders up to 1.5 THz
  • Maximum mechanical stability and repeatability combined with convenient and safe operation
  • Minimized measurement path for the best possible directivity of measurements

 

Ergonomic design

  • Unique air-cushion chuck motion control for fast, one-handed operation
  • Rigid stage accommodates up to 10 DC or 4 RF positioners
  • Highly repeatable stage lift with three positions for contact, separation and loading

 

Expandability

  • Various chuck options, PCB holders and a wide range of accessories such as DC/RF/THz micropositioners

Air-Cushion Stage

The unique design of the MPI air-cushion stage, with simple one-handed operation, provides unmatched operating comfort for fast XY navigation and fast wafer loading without compromising the precise and fine positioning capability with the additional XY-Theta micrometer movement:

  • YX: 25 x 25 mm
  • Resolution < 1 µm
  • Theta: ± 5°
  • Resolution: 7.5.10-3 gradient

 

Single Stage with Probe Hover Control™

The repeatable (1 μm) stage lift design features three discrete positions for contact, separation (300 μm) and loading (3 mm). The lift incorporates a safety interlock that prevents accidental lowering of the platform. These features provide unmatched functionality and integrate with MPI’s standard manual test systems. This system prevents damage to test tips or wafers and provides intuitive control, precise contact positioning, safe and repeatable adjustments.

Unique chuck Z position adjustment

MPI AIT and THZ probe test stations integrate, in addition to the air-cushioned XY stage, a 10 mm chuck Z adjustment with µm resolution for fine and precise contact / overtravel control or probe board placement correction.

A 1 mm scale indicator provides easy feedback to the operator.

A wide choice of chucks depending on the application

Manual systems are available with different chuck options to meet different budgets and application requirements. Options include MPI coaxial or triaxial chucks or various ERS thermal chucks to support temperature measurements up to 300°C, with seamless integration of the touchscreen control for quick and convenient access and operation.

Auxiliary Chucks for RF Calibration

The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.

Various Optics and Movement Options

A wide range of optics is available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.

Advanced anti-vibration base or table

Shelves for measuring instruments

Micro-Manipulators, DC and RF arms

Specific adaptation supports for mounting millimeter heads and tuners

Digital micrometers

Compressor and vacuum pump


Connectez-vous à notre expert
Laurent BEDDELEM
laurent.beddelem@microtest-semi.com
06.34.10.75.23

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