AIT-THz Manual Probers
On-wafer test stations for THz measurements and tuner integration
Browse the products in the range
Application
The MPI TS150/300-AIT and TS150/200-THZ on-board test systems expand MPI's unique solutions for emerging THz applications such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and healthcare equipment, and short-range automotive radars by adding active impedance tuner integrations on the same test stations. These systems are the first 150 mm, 200 mm and 300 mm explicitly designed for industry, enabling precise testing with the combination of microwave (mmW), THz application requirements and automated impedance tuner, with the best possible measurement directivity.
The TS150-THZ(ANT) for antenna measurements is also available.
Variety of applications
- Seamless integration of all differential or broadband frequency extenders up to 1.5 THz
- Maximum mechanical stability and repeatability combined with convenient, safe operation
- Minimized measurement path for best possible measurement directivity
Ergonomic design
- Unique air-cushion control of chuck movement for fast, one-handed operation
- Rigid board for up to 10 DC positioners or 4 RF positioners
- Highly reproducible stage lifting with three positions for contact, separation and loading
Scalability
- Various chuck options, PCB holders and a wide range of accessories such as DC / RF / THz micropositioners
Specifications
Air-cushion chuck
MPI’s unique air-cushion chuck design, with simple one-handed control, offers unmatched user comfort for fast XY navigation and quick wafer loading without compromising precise fine positioning capability with the additional XY-Theta micrometer motion:
- YX: 25 x 25 mm
- Resolution < 1 µm
- Theta: ± 5°
- Resolution: 7.5.10-3 gradient
Unique chuck with Probe Hover Control™
The repeatable (1 µm) chuck lift design features three discrete positions for contact, separation (300 µm) and loading (3 mm). The lift incorporates a safety lock that prevents accidental lowering of the platform. These features provide unmatched functionality and integrate MPI’s standard manual test systems. This system prevents damage to test probes or wafers and provides intuitive control, precise contact positioning, and safe, repeatable settings.
Unique chuck Z-position adjustment
In addition to the air-cushion XY chuck, MPI AIT and THZ on-wafer test stations incorporate a 10 mm chuck Z adjustment with µm resolution for fine, precise control of contact/overtravel or probe card planarity correction.
An indicator with a 1 mm scale provides easy feedback to the operator.
Options
A wide choice of chucks depending on the application
Manual systems are available with different chuck options to meet different budgets and application requirements. Options include MPI coaxial or triaxial chucks or various ERS thermal chucks to support temperature measurements up to 300°C, with seamless integration of the touchscreen control for quick and convenient access and operation.
Auxiliary Chucks for RF Calibration
The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.
Various Optics and Movement Options
A wide range of optics is available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.
Advanced anti-vibration base or table
Shelves for measuring instruments
Micro-Manipulators, DC and RF arms
Specific adaptation supports for mounting millimeter heads and tuners
Digital micrometers
Compressor and vacuum pump
