distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
MPI TS2000 Series: Semi-automatic probe test system up to 200 mm for reliable DC, RF and high power production test measurements.
Designed for a wide variety of wafer production applications
Production reliability
Ergonomic design and options
Large Breadboard
The TS2000 series features a large, easily accessible breadboard that can accommodate up to 12 DC micropositioners or 4 RF micropositioners.
The integration of Load-Pull tuners or larger area micropositioners makes the TS2000 system an ideal choice for RF and mmW measurements.
Easy Wafer Loading
The large front door access allows for an easy loading/unloading procedure for 100, 150, 200 mm wafers, wafer fragments or even small 5x5 mm ICs.
The AUX chucks are both located at the front and can be loaded/unloaded very easily.
The absence of an output stage allows for a simple automation method for RF calibration and probe card cleaning.
Integrated Control Panel
The intelligent control panel is fully integrated into the system and has been designed based on decades of experience and customer interactions to provide faster, safer and more convenient prober control and test operations. The keyboard and mouse are strategically placed to control the software if required and also control Windows® based instrumentation.
The vacuum control panel for Wafer and AUX chucks is located on the front right side for easy access during the loading/unloading procedure.
Probe Card and Micropositioners – Simultaneously
The low profile probe card holder for 4.5" x 11" probe cards and a shorter distance between the wafer and chuck are ideal for simultaneous testing with active tips, making the system an ideal choice for design validation and/or failure analysis.
Vibration Isolation
The TS2000 incorporates two types of vibration isolation solutions to better operate in different laboratory testing environments. The overall footprint is comparable to or smaller than the industry-leading stand-alone vibration isolation tables commonly used in industry.
A wide choice of chucks depending on the application
Manual systems are available with different chuck options to meet different budgets and application requirements. Options include MPI coaxial or triaxial chucks or various ERS thermal chucks to support temperature measurements up to 300°C, with seamless integration of the touchscreen control for quick and convenient access and operation.
Thermal Chuck Integration
Thermal chucks (from 20°C or ambient to 300°C maximum) can be controlled using the fully integrated touchscreen, conveniently located in front of the operator for quick operation and immediate feedback.
Auxiliary Chucks for RF Calibration
The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.
Measurement Instrument Integration
The optional instrument shelf reduces cable length and increases dynamics and measurement directionality for RF and mmW applications.
Various choices of optics and movements
A wide range of optics is available for all common DC/CV applications or for high magnification digital microscopes for RF or load-pull configurations.
Integrated DarkBox
The TS2000-D is simply the TS2000 with an integrated DarkBox!
Designed for an optimal footprint, integrated locking, LED illumination and standardized interface panels for various measurement instruments, the system is a preferred choice for light and laser protected test environments.
Easy access to the rear panel allows for quick and convenient reconfiguration or initial setup.
