distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

Optical microchamber

(option 80K at +1000°C)

Presentation:
The Micro Optical Chamber is a hyper-compact tool for your precision optical measurements.

These measurements can be carried out in the desired environmental conditions – in particular temperature – in order to reproduce real in-situ conditions.

Configuration:

  • Low weight (300 g), small volume (< 30 cc), low height (24.5 mm)
  • Focal distance between the sample stage and the top of the window: ~ 3 mm
  • Sample fixing template on the sample holder
  • Temperature regulation: from 80K to +1000°C, divided into 7 ranges of temperatures.
  • See detailed settings on the next tab.

7 configurations for sample temperature control:

1 - No temperature control device.

The sample is simply physically held on the substrate holder and can be grounded.

2 - Peltier device:
a. -40 to +200°C range, sample size: 19 x 19 mm
b. -40 to +170°C range: Peltier device with hole diam. 3.2 mm, for transmittance measurements e.g. Sample size: 16 x 16 mm

3 - Ceramic heater, sample size: Ø 1/2 inch (12.7 mm)
Thermocouple value inside the heater unit:
a. Ambient to +450 °C
b. Ambient to +750 °C
c. Ambient to +1000 °C

4 - Liquid nitrogen cooling device
Temperature: 80 K (-193.15 °C) at ambient
Temperature ramp up and down: 20 °C/min

For your most demanding and specific needs, contact us to design your custom microchamber, by defining:

  • Dimensions
  • Number of probes
  • Type of probes
  • Optical components
  • Temperature range
  • RF measurements
  • Humidity control
  • Process gas control
  • High current
  • Etc.

Connectez-vous à notre expert
Marie-Helene Bedelem
mh.beddelem@microtest-semi.com

Merci d'entrer vos coordonnées pour télécharger la fiche technique.