distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.
Hot Plate
Available in table-top or bench-mounted versions, this spinner heating plate enables thermal processes to be carried out at temperatures of up to 300°C (600°C optional).
Depending on your technical specifications, the substrate can rest directly on the heating plate or be raised slightly above it, using pneumatic liftpins (2 positions: low or high) or electronic liftpins (adjustable height).
Specific configurations for HMDS processes are available on request.
Standard hot plate