distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

Hot plates

Hot Plate

Available in table-top or bench-mounted versions, this spinner heating plate enables thermal processes to be carried out at temperatures of up to 300°C (600°C optional).

Depending on your technical specifications, the substrate can rest directly on the heating plate or be raised slightly above it, using pneumatic liftpins (2 positions: low or high) or electronic liftpins (adjustable height).

Specific configurations for HMDS processes are available on request.

Standard hot plate

  • Heating up to 350°C
  • Temperature uniformity < 1°C
  • Lifting pin option
  • Eurotherm programmable temperature controller
  • Wafer up to 200 mm