distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

UV curing

UV-951, UV-953, UV956, UV-957

AE's UV irradiation systems offer an elegant and versatile solution for processing silicon wafers up to 300mm in diameter. Thanks to their advanced technology, they guarantee uniform UV exposure over the entire surface, providing reliable and safe UVA irradiation, without ozone production.

AE's range of manual systems is distinguished by its robustness, flexibility and ease of use, meeting all your UV curing needs.

These devices offer programmable UV dosage display and lamp life measurement, allowing you to work with peace of mind.
No special nitrogen or cooling installations are required, making them completely portable and economical to use.

Whether you are looking for a reliable, versatile and/or easy to implement UV insolation solution, AE systems will meet your expectations.

  • Programmable UV dosing control for process optimization
  • Multifunctional digital control panel
  • Online system function display:
    - UV curing dosage/time
    - UV lamp status indicator LED
    - UV irradiation intensity meter
    - UV lamp life counter
  • Compact tabletop design
  • Safe and ozone-free UV irradiation source
  • Possible option for an LED source
  • Handles all standard wafer/frame sizes, up to 12 inches
  • Digital calibration
  • Flow: Approx. 30 sec./frame
  • Compatible with chips smaller than 2mm*2mm with the Small Die Option function
  • Facile : you can choose the irradiation duration (seconds) or simply the desired UV dosage (mJ/cm2). In UV Dosage mode, the system monitors UV intensity and displays UV dosage in real time. You can set the required UV dosage on the digital control panel and press Start.
  • Functional : It has a multi-function control panel with a digital process cycle timer, UV irradiation intensity and UV lamp life
  • Flexible : it is very compact and does not require connections other than electrical (220V), which makes it easy to install and use anywhere. You can just plug it in and it's ready to go.

Connectez-vous à notre expert
Nicolas Roy
nicolas.roy@microtest-semi.com

Merci d'entrer vos coordonnées pour télécharger la fiche technique.