distributeur français d’équipements et consommables pour l’industrie du Semiconducteur.

Atmospheric plasma cleaning

Atmospheric Plasma ONTOS TT

The ONTOS TT system is a revolutionary piece of equipment for substrate cleaning using helium plasma combined with various gases to deliver outstanding results:

  • Removes native oxide from metal and semiconductor surfaces.
  • Removes residual organic contamination films
  • Fast, non-toxic, dry and atmospheric process.
  • Low-energy surface chemistry – safe for CMOS
  • Ideal surface preparation for direct bonding
  • Compact tabletop configuration
  • Can be integrated into automatic systems