Probers TS2000-3000-SE
Automated probe stations with shielded environment
Browse the products in the range
Application
MPI's TS2000-SE is the first 200mm automated engineering probe test system on the market, incorporating innovative features specifically designed to reduce the cost of test. These features are incorporated into the MPI ShielDEnvironment™ for ultra-low noise, highly accurate and highly reliable DC/CV, RF and High Power measurements.
The TS3000-SE is the natural evolution of the TS3000 test system equipped with the MPI ShielDEnvironment™ for ultra-low noise, highly accurate and highly reliable DC/CV, 1/f, RTS and RF measurements, primarily addressing the needs of device characterization, wafer-level reliability and RF & mmW.
The unique design of the actively cooled test board provides maximum stability over a wide temperature range from -60° to 300°C and makes the TS2000/3000-SE systems an excellent choice for testing devices under different thermal conditions.
They incorporate MPI's advanced technologies, such as mDrive™ and/or VCE™ as an option or as a customer field upgrade.
Specifications
ShielDEnvironment™
MPI ShielDEnvironment™ is a high-performance local environmental chamber providing an excellent shielded test environment, EMI-shielded and light-tight, for ultra-low noise and low capacitance measurements.
ShielDCap™
A fully configurable part of the MPI ShielDEnvironment™ that allows up to 4 RF ports or up to 8 DC/Kelvin ports or a combination of these configurations.
Easy to reconfigure with convenient shielding that is MPI ShielDCap™ - many small things that make a difference by simplifying daily operations.
The complete ShielDCap™ is easily replaceable by the EMI shielded version of a probe card holder.
Integrated control panel
The intelligent control panel is completely integrated into the system and has been designed based on decades of experience and customer interactions to offer faster, safer and more convenient prober control and test operations. The keyboard and mouse are strategically placed to control the software if necessary and also control Windows®-based instrumentation.
The vacuum control panel for Wafer and AUX chucks is located on the front right side for easy access during the loading/unloading procedure.
Integrated ERS-patented AC3 cooling technology
These chucks incorporate ERS-patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from "already used" air - reducing dry air consumption by up to 30 to 50% compared to other systems on the market.
Options
A wide range of chucks to suit the application
The TS2000/3000-SE is available with different chuck options to suit different budgets and application requirements:
Ambient chucks: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for precise RF calibration.
Various ERS AirCool thermal chucks from -60°C to 300°C.
Auxiliary chucks for RF calibration
The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.
Measurement instrument integration
The optional instrument shelf reduces cable length and increases measurement dynamics and directivity for RF and mmW applications.
Different choices of optics and movements
A wide range of optics is available for all common DC/CV applications or for high-magnification digital microscopes for RF or load-pull configurations.
Advanced alignment
Advanced alignment features such as the down-facing off-axis camera and the up-facing camera mounted on the chuck make the TS2000/3000-SE an ideal platform for testing in complex RF, mmW and SiPh measurement setups. Decades of experience from the MPI Photonics Automation division make this option very reliable.
