French distributor of equipment and consumables for the Semiconductor industry.

IFE Manual Probers

Ice-Free Environment Probe Test Stations

Application

The MPI TS200-IFE/TS300-IFE (IceFreeDEnvironment™) are the result of the development of MPI's IceFreeEnvironment™, combining the convenient "open system" operation of the TS200/300, with the ability to test at sub-zero temperatures (down to -60°C). The design shortens the signal path, making the probe station an ideal choice for mmW and/or load-pull applications.

Universal use

  • Designed for a wide variety of applications such as device characterization and modeling, reliability testing, RF and mmW testing and failure analysis
  • Wide temperature range from -60 °C to 300 °C

 

Ergonomic design and options

  • Unique air-cushion control of chuck movement for fast, one-handed operation
  • Available with various chuck options and a wide range of accessories such as DC / RF / mmW micropositioners, microscopes and the ShielDEnviroment™ provide excellent support for various applications.

Specifications

IceFreeEnvironment™
Integrating MPI's IceFreeEnvironment™, the TS200/300-IFE enables testing with MicroPositioners and probe cards simultaneously over a wide temperature range from -60°C to +300°C.
The design shortens the signal path, making the probe station an ideal choice for mmW and/or load-pull applications.

Air-cushion platen
MPI's unique air-cushion platen design, with simple one-handed control, offers unmatched ease of use for fast XY navigation and rapid wafer loading without compromising precise and fine positioning capability with the additional XY-Theta micrometer movement:

  • YX: 25 x 25 mm
  • Resolution < 1 µm
  • Theta: ± 5°
  • Resolution: 7.5×10⁻³ gradient

 

Unique platen with Probe Hover Control™
The repeatable (1 μm) platen elevator design features three discrete positions for contact, separation (300 μm) and loading (3 mm). The elevator incorporates a safety lock that prevents accidental platform descent. These features offer unmatched functionality and integrate MPI's standard manual test systems. This system prevents damage to test probes or wafers and offers intuitive control, precise contact positioning, safe and repeatable adjustments.

Unique chuck Z-position adjustment
The TS200/300-IFE integrate, in addition to the XY air-cushion platen, a 5 mm chuck Z adjustment with µm resolution for fine and precise control of contact / overtravel or probe card placement correction.
An indicator with a 1 mm scale provides easy feedback to the operator. The 20 mm pneumatic elevator further offers an easy and convenient loading/unloading procedure.

Options

Various chuck options

The TS200/300-IFE is available with various chuck options to meet different budgets and application requirements:

  • Ambient chucks: Coaxial, Triaxial or RF with two ceramic auxiliary chucks for precise RF calibration.
  • Various ERS AirCool thermal chucks from -60°C to 300°C.

 

Temperature control integration
The wafer loading door is simply locked at any temperature below 15°C - this unique feature makes the TS200/300-IFE the safest manual test stations on the market.
In addition, the thermal chuck can be controlled using the fully integrated touchscreen, conveniently located in front of the operator for fast operation and immediate feedback.

Integrated ERS patented AC3 cooling technology

These chucks incorporate ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from "used" air - reducing dry air consumption by up to 30-50% compared to other systems on the market.

Various choices of optics and movements

A wide range of optics are available with a choice of stereo for all common DC/CV applications or high magnification single-tube microscopes for RF or load-pull configurations. High-resolution cameras for optimum comfort are also offered.

Advanced anti-vibration base or table

Shelves for measuring instruments

Probe card holder

Digital micrometers

Compressor and vacuum pump

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