TS2000 standard prober
Automated wafer test stations up to 200 mm
Browse the products in the range
Application
MPI TS2000 Series: Semi-automatic probe test system up to 200 mm for reliable DC, RF and high power production test measurements.
Designed for a wide variety of wafer production applications
- DC-IV/ DC-CV / Pulsed-IV applications
- RF applications up to 67 GHz and 4-port configuration
- High-power generation applications up to 10 kV / 600 A
- IC design validation from ambient to 300°C
Production reliability
- Designed for 24/7 production reliability
- Integrated passive anti-vibration table
- Optional active anti-vibration base
- Designed for ambient temperature measurements up to 300°C
Ergonomic design and options
- Designed for easy front loading of a single wafer
- Large test board supporting up to 12x DC or 4x DC + 4x RF MicroPositioners or standard 4.5" probe card support.
- Available with various chuck options and a wide range of accessories such as 4.5" probe card adapter, DC / RF micropositioners, high-performance microscopes to support a variety of applications
Specifications
Large test platen
The TS2000 series features a large, easily accessible test platen, accommodating up to 12 DC positioners or 4 RF positioners.
Integration of Load-Pull tuners or larger footprint positioners makes the TS2000 system an ideal choice for RF and mmW measurements.
Easy wafer loading
Wide access through the front door allows easy loading/unloading procedure for 100, 150, 200 mm wafers, wafer fragments or even small 5×5 mm ICs.
Both AUX chucks are located at the front and can be loaded/unloaded very easily.
The absence of an output stage enables a simple automation method for RF calibration and probe card cleaning.
Integrated control panel
The intelligent control panel is completely integrated into the system and has been designed based on decades of experience and customer interactions to provide faster, safer and more convenient prober control and test operations. The keyboard and mouse are strategically positioned to control the software as needed and also control Windows®-based instrumentation.
The vacuum control panel for Wafer and AUX chucks is located on the right front side for easy access during the loading/unloading procedure.
Probe card and positioners – simultaneously
The low-profile probe card holder for 4.5" x 11" probe cards and a reduced distance between the wafer and chuck are perfect for simultaneous testing with active probes, making the system an ideal choice for design validation and/or failure analysis.
Vibration isolation
The TS2000 integrates two types of vibration isolation solutions to perform better in different laboratory test environments. The total footprint is comparable to or smaller than the leading standalone vibration isolation tables commonly used in the industry.
Options
A wide choice of chucks depending on the application
Manual systems are available with different chuck options to meet different budgets and application requirements. Options include MPI coaxial or triaxial chucks or various ERS thermal chucks to support temperature measurements up to 300°C, with seamless integration of the touchscreen control for quick and convenient access and operation.
Thermal Chuck Integration
Thermal chucks (from 20°C or ambient to 300°C maximum) can be controlled using the fully integrated touchscreen, conveniently located in front of the operator for quick operation and immediate feedback.
Auxiliary Chucks for RF Calibration
The RF chucks incorporate two auxiliary chucks constructed of ceramic for precise RF calibration.
Measurement Instrument Integration
The optional instrument shelf reduces cable length and increases dynamics and measurement directionality for RF and mmW applications.
Various choices of optics and movements
A wide range of optics is available for all common DC/CV applications or for high magnification digital microscopes for RF or load-pull configurations.
Integrated DarkBox
The TS2000-D is simply the TS2000 with an integrated DarkBox!
Designed for an optimal footprint, integrated locking, LED illumination and standardized interface panels for various measurement instruments, the system is a preferred choice for light and laser protected test environments.
Easy access to the rear panel allows for quick and convenient reconfiguration or initial setup.
