{"id":16701,"date":"2022-04-19T09:40:40","date_gmt":"2022-04-19T09:40:40","guid":{"rendered":"https:\/\/microtest-semi.com\/treatment-and-annealing-furnaces-rtp-and-vpo\/"},"modified":"2024-07-27T05:12:28","modified_gmt":"2024-07-27T05:12:28","slug":"treatment-and-annealing-furnaces-rtp-and-vpo","status":"publish","type":"page","link":"https:\/\/microtest-semi.com\/en\/front-end\/ovens\/treatment-and-annealing-furnaces-rtp-and-vpo","title":{"rendered":"Treatment and annealing furnaces (RTP and VPO)"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"16701\" class=\"elementor elementor-16701 elementor-7377\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-53f0a615 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"53f0a615\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div 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style=\"fill:#fab920;\"><\/path><\/svg>\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b463ade elementor-widget__width-auto elementor-widget elementor-widget-heading\" data-id=\"b463ade\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Treatment and annealing furnaces (RTP and VPO)\n<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a8660da elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"a8660da\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-3c5d3cb\" data-id=\"3c5d3cb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2657836 elementor-widget elementor-widget-text-editor\" data-id=\"2657836\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>For rapid annealing, oxidation, nitriding, sulfurizing, carburizing, dopant diffusion, crystallization, densification and wafer bonding processes.<\/strong><\/p>\n<ul>\n<li>Auto loading or manual loading on request, single or from 5 or 25-wafer cassettes<\/li>\n<li>Front or top opening (safety lock to prevent opening during process)<\/li>\n<li>Radiant heating (top and bottom infrared lamps) up to 1200\u00b0C<\/li>\n<li>Temperature uniformity &lt; 1\u00b0C<\/li>\n<li>Ultra-controlled process under perfectly repeatable conditions for identical results in every process<\/li>\n<li>Up to 4 gas lines<\/li>\n<li>Safety enclosure around furnace for hydrogen process<\/li>\n<li>Pressure from 3.10-3 hPa to 10-6 hPa<\/li>\n<li>Temperature rise rate: 100 \u00b0C\/s max.<\/li>\n<li>Temperature descent rate: 200 \u00b0C\/min max.<\/li>\n<li>Ultra-compact system<\/li>\n<li>Touch screen programming<\/li>\n<li>Wafer up to 300 mm<\/li>\n<\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-ebe9d1e\" data-id=\"ebe9d1e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-13120db elementor-widget 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Auto loading or manual loading on request, single or from 5 or 25-wafer cassettes Front or top opening (safety lock to prevent opening during process) Radiant heating (top and bottom infrared lamps) up [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":18632,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"elementor_header_footer","meta":{"footnotes":""},"class_list":["post-16701","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.7 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Treatment and annealing furnaces (RTP and VPO) - Microtest<\/title>\n<meta name=\"description\" content=\"Microtest offers you RTP and VPO treatment and annealing furnaces for top-quality manufacturing processes.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/microtest-semi.com\/en\/front-end\/ovens\/treatment-and-annealing-furnaces-rtp-and-vpo\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Treatment and annealing furnaces (RTP and VPO) - 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